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Semiconductor devices. Micro-electromechanical devices - Bulge test method for measuring mechanical properties of thin films
Description
Semiconductor devices. Micro-electromechanical devices - Bulge test method for measuring mechanical properties of thin filmsWhat is BS EN 62047 17 Mechanical properties of thin films about? BS EN 62047 17 is the 17th part of an international standard used for semiconductor devices. BS EN 62047 17 specifies the method for performing bulge tests on the free standing film that is bulged within a window. The specimen is fabricated with micro nano structural film materials, including metal, ceramic and polymer films, for MEMS, micromachines and others. The thickness of the film
with the sterile barrier intact
This part of IEC 61935 specifies additional reference measurement procedures for measurement of resistance unbalance with field test instrumentation
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and specifies the designation of spring collars and pilot pins that are in accordance with its requirements
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